Measurement Sensor - Company Ranking(9 companyies in total)
Last Updated: Aggregation Period:Jul 09, 2025〜Aug 05, 2025
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Display Company Information
Company Name | Featured Products | ||
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Product Image, Product Name, Price Range | overview | Application/Performance example | |
◆ Auto Leveling System 2 (ALS2) Accelerates real-time vibration and leveling measurements. Quickly verifies equipment and improves equipment uptime. ◆ Auto Teaching System (ATS2) Arranged similarly to wafers, it measures the position coordinate data (XYZ) of wafers with high precision. ◆ Auto Gap Measurement System (AGS) Achieves parallelism adjustment through vacuum-compatible non-contact gap measurement that can be used in semiconductor process chambers such as PECVD, dry etching, and sputtering equipment. ◆ Auto Vibration System (AVS) Can automatically transport within process equipment to measure 3-axis acceleration and vibration. ◆ Airborne Particle Sensor (APS) Efficiently troubleshoots semiconductor process equipment and automated transport systems by quickly detecting airborne particles from 0.14um. It allows real-time verification of internal cleanliness without opening the equipment, preventing exposure of the process environment to maintenance conditions. ◆ Auto Multi-Sensor (AMS) A multi-sensor that combines vibration, level, and humidity into one package for speedy adjustments. | Used for wafer positioning, leveling, spacing adjustment, acceleration & vibration, and particle measurement in semiconductor process equipment. Can be used in a vacuum. Real-time data acquisition is possible. Various data can be quantified and logged. | ||
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- Featured Products
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Wafer Sense - Measurement sensor for improving manufacturing equipment by Cyber Optics.
- overview
- ◆ Auto Leveling System 2 (ALS2) Accelerates real-time vibration and leveling measurements. Quickly verifies equipment and improves equipment uptime. ◆ Auto Teaching System (ATS2) Arranged similarly to wafers, it measures the position coordinate data (XYZ) of wafers with high precision. ◆ Auto Gap Measurement System (AGS) Achieves parallelism adjustment through vacuum-compatible non-contact gap measurement that can be used in semiconductor process chambers such as PECVD, dry etching, and sputtering equipment. ◆ Auto Vibration System (AVS) Can automatically transport within process equipment to measure 3-axis acceleration and vibration. ◆ Airborne Particle Sensor (APS) Efficiently troubleshoots semiconductor process equipment and automated transport systems by quickly detecting airborne particles from 0.14um. It allows real-time verification of internal cleanliness without opening the equipment, preventing exposure of the process environment to maintenance conditions. ◆ Auto Multi-Sensor (AMS) A multi-sensor that combines vibration, level, and humidity into one package for speedy adjustments.
- Application/Performance example
- Used for wafer positioning, leveling, spacing adjustment, acceleration & vibration, and particle measurement in semiconductor process equipment. Can be used in a vacuum. Real-time data acquisition is possible. Various data can be quantified and logged.
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